VAMAS Surface Chemical Analysis Standard Data Transfer Format 1988 May 4
XI Ltd.
XI Spectral Data Processor
XI ASCII
Freshly cleaved Si<100> wafer, 10eV pass energy
1
(analyzed exposed bulk, unknown doping, no etch)
NORM
REGULAR
1
0
0
0
0
0
1
(analyzed exposed bulk, unknown doping, no etch)
Freshly cleaved Si<100> wafer, 10eV pass energy
2003
5
10
14
43
59
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
50
1
0
0
1000
2000
55
0
data_1
data_1
-1
Binding energy
eV
102
-0.0314961
2
counts
d
Transmission
d
pulse counting
0.2
200
4.00E-06
0
0
0
0
256
0
1415
0.31266
0.313201
81
0.313201
103
0.313197
75
0.313193
84
0.313188
62
0.313184
75
0.31318
71
0.313176
70
0.313171
58
0.313167
68
0.313163
58
0.313158
48
0.313154
79
0.31315
33
0.313146
36
0.313141
47
0.313137
54
0.313133
65
0.313129
41
0.313124
47
0.31312
53
0.313116
76
0.313111
56
0.313107
66
0.313103
60
0.313099
61
0.313094
67
0.31309
48
0.313086
65
0.313082
71
0.313077
88
0.313073
97
0.313069
82
0.313064
74
0.31306
84
0.313056
103
0.313052
53
0.313047
101
0.313043
50
0.313039
77
0.313035
99
0.31303
84
0.313026
77
0.313022
140
0.313018
116
0.313013
122
0.313009
113
0.313005
121
0.313
131
0.312996
177
0.312992
152
0.312988
193
0.312983
247
0.312979
247
0.312975
298
0.312971
333
0.312966
468
0.312962
517
0.312958
553
0.312954
610
0.312949
742
0.312945
756
0.312941
764
0.312936
803
0.312932
736
0.312928
687
0.312924
611
0.312919
553
0.312915
526
0.312911
430
0.312907
421
0.312902
472
0.312898
466
0.312894
500
0.31289
579
0.312885
659
0.312881
845
0.312877
1007
0.312872
1138
0.312868
1270
0.312864
1294
0.31286
1415
0.312855
1342
0.312851
1356
0.312847
1227
0.312843
1100
0.312838
942
0.312834
731
0.31283
587
0.312826
412
0.312821
289
0.312817
267
0.312813
200
0.312809
162
0.312804
131
0.3128
92
0.312796
76
0.312792
109
0.312787
66
0.312783
38
0.312779
32
0.312774
15
0.31277
49
0.312766
38
0.312762
13
0.312757
8
0.312753
30
0.312749
34
0.312745
10
0.31274
32
0.312736
28
0.312732
24
0.312728
8
0.312723
21
0.312719
8
0.312715
51
0.312711
39
0.312706
23
0.312702
38
0.312698
0
0.312694
29
0.312689
46
0.312685
37
0.312681
29
0.312677
35
0.312672
40
0.312668
21
0.312664
40
0.31266
end of experiment
